Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2
In this article nickel interdigital capacitors were fabricated on top of silicon substrates.The kiara sky peach sangria capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2.An analytical solution of the capacitance was compared zuca pro artist to electromagnetic simulations using COMSOL and wi